Nanoscale solely amorphous layer in silicon wafers induced by a newly developed diamond wheel
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چکیده
منابع مشابه
Nanoscale solely amorphous layer in silicon wafers induced by a newly developed diamond wheel
Nanoscale solely amorphous layer is achieved in silicon (Si) wafers, using a developed diamond wheel with ceria, which is confirmed by high resolution transmission electron microscopy (HRTEM). This is different from previous reports of ultraprecision grinding, nanoindentation and nanoscratch, in which an amorphous layer at the top, followed by a crystalline damaged layer beneath. The thicknesse...
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ژورنال
عنوان ژورنال: Scientific Reports
سال: 2016
ISSN: 2045-2322
DOI: 10.1038/srep35269